A generalized model of electrically actuated, microbeam-based MEMS devices

Eihab M. Abdel-Rahman, Samir A. Emam, Ali H. Nayfeh

Research output: Contribution to conferencePaperpeer-review

6 Citations (Scopus)

Abstract

We present a model of electrically actuated microbeam-based MEMS devices incorporating the nonlinearities associated with moderately large displacements and electric forces. The model can handle any capacitor configuration disposing of the complete electrode-overlapping (parallel-plate theory) restriction. The boundary-value problem describing the static deflection of the microbeam under the electrostatic loading is solved numerically. The eigenvalue problem describing the vibration of the microbeam around its statically deflected position is solved numerically for the natural frequencies and mode shapes. Results generated by our model for the parallel-plate case are in agreement with published results. Our results show that the underlying assumptions of the closed-form formula of the parallel-plate case underestimates the electrostatic force and leads to an overestimation of the pull-in voltage. The model provides an analytical tool to predict the static and dynamic response of any electrically actuated MEMS device based on clamped-clamped microbeams.

Original languageEnglish
Pages1837-1842
Number of pages6
DOIs
Publication statusPublished - 2003
Event2003 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Chicago, IL, United States
Duration: Sep 2 2003Sep 6 2003

Other

Other2003 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Country/TerritoryUnited States
CityChicago, IL
Period9/2/039/6/03

ASJC Scopus subject areas

  • Modelling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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