A new fully differential CMOS capacitance to digital converter for lab-on-chip applications

In this paper, we present a new differential CMOS capacitive sensor for Lab-on-Chip applications. The proposed integrated sensor features a DC-input ΣΔ capacitance to digital converter (CDC) and two reference and sensing microelectrodes integrated on the top most metal layer in 0.35 μ m CMOS process. Herein, we describe a readout circuitry with a programmable clocking strategy using a Charge Based Capacitance Measurement technique. The simulation and experimental results demonstrate a high capacitive dynamic range of 100 fF-110 fF, the sensitivity of 350 mV/fF and the minimum detectable capacitance variation of as low as 10 aF. We also demonstrate and discuss the use of this device for environmental applications through various chemical solvents.