TY - GEN
T1 - A novel method for PZT thin film piezoelectric coefficients determination using conventional impedance analyzer
AU - Al-Ahmad, Mahmoud
AU - Plana, Robert
PY - 2007
Y1 - 2007
N2 - In this work, novel and simple method is described for the determination of the thin-film piezoelectric coefficient d33, which utilizes the conventional impedance or network analyzer. The technique avoids complicated preparation and uses arbitrary sample geometry. It may be used to determine the piezoelectric coefficient for films having a thickness ranges from several nanometers up to around several hundreds micrometers. The predicted values for the piezoelectric coefficient are found to be close to those that have been determined by more elaborated methods.
AB - In this work, novel and simple method is described for the determination of the thin-film piezoelectric coefficient d33, which utilizes the conventional impedance or network analyzer. The technique avoids complicated preparation and uses arbitrary sample geometry. It may be used to determine the piezoelectric coefficient for films having a thickness ranges from several nanometers up to around several hundreds micrometers. The predicted values for the piezoelectric coefficient are found to be close to those that have been determined by more elaborated methods.
KW - MEMS
KW - Material characterization
KW - Microwave measurements
KW - Piezoelectric material
UR - http://www.scopus.com/inward/record.url?scp=48349106202&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48349106202&partnerID=8YFLogxK
U2 - 10.1109/EUMC.2007.4405161
DO - 10.1109/EUMC.2007.4405161
M3 - Conference contribution
AN - SCOPUS:48349106202
SN - 9782874870033
T3 - Proceedings of the 37th European Microwave Conference, EUMC
SP - 202
EP - 205
BT - Proceedings of the 37th European Microwave Conference, EUMC
T2 - 37th European Microwave Conference, EUMC
Y2 - 9 October 2007 through 12 October 2007
ER -