A novel method for PZT thin film piezoelectric coefficients determination using conventional impedance analyzer

Mahmoud Al-Ahmad, Robert Plana

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

In this work, novel and simple method is described for the determination of the thin-film piezoelectric coefficient d33, which utilizes the conventional impedance or network analyzer. The technique avoids complicated preparation and uses arbitrary sample geometry. It may be used to determine the piezoelectric coefficient for films having a thickness ranges from several nanometers up to around several hundreds micrometers. The predicted values for the piezoelectric coefficient are found to be close to those that have been determined by more elaborated methods.

Original languageEnglish
Title of host publicationProceedings of the 37th European Microwave Conference, EUMC
Pages202-205
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event37th European Microwave Conference, EUMC - Munich, Germany
Duration: Oct 9 2007Oct 12 2007

Publication series

NameProceedings of the 37th European Microwave Conference, EUMC

Other

Other37th European Microwave Conference, EUMC
Country/TerritoryGermany
CityMunich
Period10/9/0710/12/07

Keywords

  • MEMS
  • Material characterization
  • Microwave measurements
  • Piezoelectric material

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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