A static and nonlinear dynamic analysis of resonant microbeams

Samir A. Emam, Mahmoud E. Khater, Emil H. Gad

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

An investigation into the response of microbeams to DC and AC electric actuation is presented. The beam is modeled according to the Euler-Bernoulli beam theory and small strains and moderate rotation approximations are assumed. The governing equation is a nonlinear integral-partial-differential equation in space and time. The model accounts for mid-plane stretching, applied axial load, DC electrostatic forces, and AC harmonic forces. A reduced-order model based on the Galerkin discretization technique is introduced to simulate the behavior of microswitches and resonant sensors. The static behavior of the microbeam under electrostatic forces is studied and compared to the results available in the literature. The dynamic behavior of resonant microbeams under AC harmonic forces is investigated. An analytical solution for the vibration modes and natural frequencies of the microbeam around its statically deflected position is obtained. A shooting method is used to numerically integrate the nonlinear discretized equations and obtain periodic orbits of the response. The stability of these periodic orbits is investigated using Floquet theory. The sensitivity of the device to small-amplitude excitations is also investigated.

Original languageEnglish
Title of host publication2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
Pages883-892
Number of pages10
DOIs
Publication statusPublished - 2008
Event21st Biennial Conference on Mechanical Vibration and Noise, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007 - Las Vegas, NV, United States
Duration: Sept 4 2007Sept 7 2007

Publication series

Name2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
Volume1 PART B

Other

Other21st Biennial Conference on Mechanical Vibration and Noise, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007
Country/TerritoryUnited States
CityLas Vegas, NV
Period9/4/079/7/07

ASJC Scopus subject areas

  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Mechanical Engineering
  • Modelling and Simulation

Fingerprint

Dive into the research topics of 'A static and nonlinear dynamic analysis of resonant microbeams'. Together they form a unique fingerprint.

Cite this