TY - GEN
T1 - A surface micromachined spiral-channel viscous pump
AU - Kilani, Mohammad I.
AU - Galambos, Paul C.
AU - Haik, Yousef S.
AU - Chen, Ching Jen
PY - 2002
Y1 - 2002
N2 - The paper introduces a new viscous pump, called the spiral pump, which targets surface micromachining, and outlines its implementation in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT). For the purpose of analyzing the flow field in the pump, the spiral channel is approximated as an equivalent straight channel. After demonstrating the validity of this approximation for typical design, the paper presents a lubrication solution of the flow field in the channel, which is used to relate the flow rate, torque and power to rotation rate and pressure head. Experimental flow rate versus pressure data obtained from a scaled up spiral pump prototype are compared with analytical predictions, highlighting needed research efforts in modeling and analysis of the spiral pump.
AB - The paper introduces a new viscous pump, called the spiral pump, which targets surface micromachining, and outlines its implementation in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT). For the purpose of analyzing the flow field in the pump, the spiral channel is approximated as an equivalent straight channel. After demonstrating the validity of this approximation for typical design, the paper presents a lubrication solution of the flow field in the channel, which is used to relate the flow rate, torque and power to rotation rate and pressure head. Experimental flow rate versus pressure data obtained from a scaled up spiral pump prototype are compared with analytical predictions, highlighting needed research efforts in modeling and analysis of the spiral pump.
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U2 - 10.1115/IMECE2002-33667
DO - 10.1115/IMECE2002-33667
M3 - Conference contribution
AN - SCOPUS:78249290529
SN - 0791836576
SN - 9780791836576
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 469
EP - 475
BT - Fluids Engineering
PB - American Society of Mechanical Engineers (ASME)
ER -