Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

M. Al-Ahmad; C. Loyez; N. Rolland; R. Planat; P. A. Rolland

doi:10.1109/EUMC.2007.4405140

Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

M. Al-Ahmad, C. Loyez, N. Rolland, R. Planat, P. A. Rolland

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, S_eff, increases continuously from 5 μm to 10.5 μm. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).

Original language	English
Title of host publication	Proceedings of the 37th European Microwave Conference, EUMC
Pages	118-121
Number of pages	4
DOIs	https://doi.org/10.1109/EUMC.2007.4405140
Publication status	Published - 2007
Externally published	Yes
Event	37th European Microwave Conference, EUMC - Munich, Germany Duration: Oct 9 2007 → Oct 12 2007

Publication series

Name	Proceedings of the 37th European Microwave Conference, EUMC

Other

Other	37th European Microwave Conference, EUMC
Country/Territory	Germany
City	Munich
Period	10/9/07 → 10/12/07

Keywords

Microelectromechanical devices
Microstrip resonators
Negative resistance circuits
Oscillator, piezoelectric material
Tunable devices and circuits
Tuning
Varactors
Voltage controlled oscillator

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/EUMC.2007.4405140

Cite this

Al-Ahmad, M., Loyez, C., Rolland, N., Planat, R., & Rolland, P. A. (2007). Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator. In Proceedings of the 37th European Microwave Conference, EUMC (pp. 118-121). Article 4405140 (Proceedings of the 37th European Microwave Conference, EUMC). https://doi.org/10.1109/EUMC.2007.4405140

Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator. / Al-Ahmad, M.; Loyez, C.; Rolland, N. et al.
Proceedings of the 37th European Microwave Conference, EUMC. 2007. p. 118-121 4405140 (Proceedings of the 37th European Microwave Conference, EUMC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Al-Ahmad, M, Loyez, C, Rolland, N, Planat, R & Rolland, PA 2007, Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator. in Proceedings of the 37th European Microwave Conference, EUMC., 4405140, Proceedings of the 37th European Microwave Conference, EUMC, pp. 118-121, 37th European Microwave Conference, EUMC, Munich, Germany, 10/9/07. https://doi.org/10.1109/EUMC.2007.4405140

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abstract = "In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, Seff, increases continuously from 5 μm to 10.5 μm. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).",

keywords = "Microelectromechanical devices, Microstrip resonators, Negative resistance circuits, Oscillator, piezoelectric material, Tunable devices and circuits, Tuning, Varactors, Voltage controlled oscillator",

author = "M. Al-Ahmad and C. Loyez and N. Rolland and R. Planat and Rolland, {P. A.}",

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doi = "10.1109/EUMC.2007.4405140",

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AU - Loyez, C.

AU - Rolland, N.

AU - Planat, R.

AU - Rolland, P. A.

PY - 2007

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N2 - In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, Seff, increases continuously from 5 μm to 10.5 μm. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).

AB - In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, Seff, increases continuously from 5 μm to 10.5 μm. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).

KW - Microelectromechanical devices

KW - Microstrip resonators

KW - Negative resistance circuits

KW - Oscillator, piezoelectric material

KW - Tunable devices and circuits

KW - Tuning

KW - Varactors

KW - Voltage controlled oscillator

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Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

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Keywords

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