TY - GEN
T1 - Capacitance force piezoelectric extraction
AU - Al Ahmad, Mahmoud
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/7/29
Y1 - 2015/7/29
N2 - The functionality of the piezoelectric materials is being used in many integrated applications due to their electrical-mechanical reciprocity. Here we have demonstrated that piezoelectric film coefficient can be characterized using capacitance force direct relationship. The proposed technique makes such determination by taking the measuring the capacitance of a piezoelectric disk with the application of mechanical force under a set of assumptions in deriving the equations for the d33 coefficient. Both; the classical parallel plate capacitance analysis and piezoelectric material theory are used to calculate the capacitance variation in lead zirconate titanate (PZT) film, enabling piezoelectric coefficient to be determined. The technique fits well sheet characterization avoiding any complicated preparation and uses arbitrary sample geometry. The values of the coefficients obtained experimentally are found to be similar to those that have been determined by more elaborate methods.
AB - The functionality of the piezoelectric materials is being used in many integrated applications due to their electrical-mechanical reciprocity. Here we have demonstrated that piezoelectric film coefficient can be characterized using capacitance force direct relationship. The proposed technique makes such determination by taking the measuring the capacitance of a piezoelectric disk with the application of mechanical force under a set of assumptions in deriving the equations for the d33 coefficient. Both; the classical parallel plate capacitance analysis and piezoelectric material theory are used to calculate the capacitance variation in lead zirconate titanate (PZT) film, enabling piezoelectric coefficient to be determined. The technique fits well sheet characterization avoiding any complicated preparation and uses arbitrary sample geometry. The values of the coefficients obtained experimentally are found to be similar to those that have been determined by more elaborate methods.
UR - http://www.scopus.com/inward/record.url?scp=84947998675&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84947998675&partnerID=8YFLogxK
U2 - 10.1109/ISAF.2015.7172719
DO - 10.1109/ISAF.2015.7172719
M3 - Conference contribution
AN - SCOPUS:84947998675
T3 - 2015 Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015
SP - 253
EP - 256
BT - 2015 Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - Joint IEEE International Symposium on the Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop, ISAF/ISIF/PFM 2015
Y2 - 24 May 2015 through 27 May 2015
ER -