Defective wafer detection using neural network approach and multivariate statistical approach

Abderrahmane Boubezoul; Bouchra Ananou; Mustapha Ouladsine; Sebastien Paris; Hassan Noura

Defective wafer detection using neural network approach and multivariate statistical approach

Abderrahmane Boubezoul, Bouchra Ananou, Mustapha Ouladsine, Sebastien Paris, Hassan Noura

Department of Electrical and Communication Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

In this paper, we introduce an automatic classification approach based on combining two algorithms. One of them belongs to Neural Networks approach and the second is based on Multivariate Statistical approach. In this study we will present two algorithms their relative strengths and weaknesses. We realize that these two methods can complement one another resulting in better decision support system. Integrating these complementary features is one way to develop hybrid system that could overcome the limitations of individual solution strategies. We evaluate this hybrid system on data provided by semiconductor fab, especially on Parametric Tests (PT) data. This procedure was successfully validated at PT data provided by STMicroelectronics - Rousset fab.

Original language	English
Pages	125-130
Number of pages	6
Publication status	Published - 2007
Event	3rd International Conference on Advances in Vehicle Control and Safety 2007, AVCS 2007 and 3rd International Conference on Integrated Modeling and Analysis in Applied Control and Automation, IMAACA 2007, Held at the IMSM 2007 - Buenos Aires, Argentina Duration: Feb 8 2007 → Feb 10 2007

Other

Other	3rd International Conference on Advances in Vehicle Control and Safety 2007, AVCS 2007 and 3rd International Conference on Integrated Modeling and Analysis in Applied Control and Automation, IMAACA 2007, Held at the IMSM 2007
Country/Territory	Argentina
City	Buenos Aires
Period	2/8/07 → 2/10/07

Keywords

GRLVQ
Parametric tests

ASJC Scopus subject areas

Automotive Engineering
Control and Systems Engineering
Safety, Risk, Reliability and Quality

Cite this

Boubezoul, A., Ananou, B., Ouladsine, M., Paris, S., & Noura, H. (2007). Defective wafer detection using neural network approach and multivariate statistical approach. 125-130. Paper presented at 3rd International Conference on Advances in Vehicle Control and Safety 2007, AVCS 2007 and 3rd International Conference on Integrated Modeling and Analysis in Applied Control and Automation, IMAACA 2007, Held at the IMSM 2007, Buenos Aires, Argentina.

Defective wafer detection using neural network approach and multivariate statistical approach. / Boubezoul, Abderrahmane; Ananou, Bouchra; Ouladsine, Mustapha et al.
2007. 125-130 Paper presented at 3rd International Conference on Advances in Vehicle Control and Safety 2007, AVCS 2007 and 3rd International Conference on Integrated Modeling and Analysis in Applied Control and Automation, IMAACA 2007, Held at the IMSM 2007, Buenos Aires, Argentina.

Research output: Contribution to conference › Paper › peer-review

Boubezoul, A, Ananou, B, Ouladsine, M, Paris, S & Noura, H 2007, 'Defective wafer detection using neural network approach and multivariate statistical approach', Paper presented at 3rd International Conference on Advances in Vehicle Control and Safety 2007, AVCS 2007 and 3rd International Conference on Integrated Modeling and Analysis in Applied Control and Automation, IMAACA 2007, Held at the IMSM 2007, Buenos Aires, Argentina, 2/8/07 - 2/10/07 pp. 125-130.

Boubezoul A, Ananou B, Ouladsine M, Paris S, Noura H. Defective wafer detection using neural network approach and multivariate statistical approach. 2007. Paper presented at 3rd International Conference on Advances in Vehicle Control and Safety 2007, AVCS 2007 and 3rd International Conference on Integrated Modeling and Analysis in Applied Control and Automation, IMAACA 2007, Held at the IMSM 2007, Buenos Aires, Argentina.

Boubezoul, Abderrahmane ; Ananou, Bouchra ; Ouladsine, Mustapha et al. / Defective wafer detection using neural network approach and multivariate statistical approach. Paper presented at 3rd International Conference on Advances in Vehicle Control and Safety 2007, AVCS 2007 and 3rd International Conference on Integrated Modeling and Analysis in Applied Control and Automation, IMAACA 2007, Held at the IMSM 2007, Buenos Aires, Argentina.6 p.

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AU - Noura, Hassan

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Defective wafer detection using neural network approach and multivariate statistical approach

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Keywords

ASJC Scopus subject areas

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