Design and analysis of a surface micromachined spiral-channel viscous pump

Mohammad I. Kilani; Paul C. Galambos; Yousef S. Haik; Ching Jen Chen

doi:10.1115/1.1524582

Design and analysis of a surface micromachined spiral-channel viscous pump

Mohammad I. Kilani, Paul C. Galambos, Yousef S. Haik, Ching Jen Chen

Research output: Contribution to journal › Article › peer-review

48 Citations (Scopus)

Abstract

A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT), and presents an analytical solution of the flow field in its spiral channel. The pump characteristics are obtained experimentally for a scaled-up prototype and are found to be in good agreement with the results obtained using the analytical model.

Original language	English
Pages (from-to)	339-344
Number of pages	6
Journal	Journal of Fluids Engineering, Transactions of the ASME
Volume	125
Issue number	2
DOIs	https://doi.org/10.1115/1.1524582
Publication status	Published - Mar 2003
Externally published	Yes

ASJC Scopus subject areas

Mechanical Engineering

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@article{fff15fde0e1d4695ba7a49c60ac7d3fb,

title = "Design and analysis of a surface micromachined spiral-channel viscous pump",

abstract = "A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT), and presents an analytical solution of the flow field in its spiral channel. The pump characteristics are obtained experimentally for a scaled-up prototype and are found to be in good agreement with the results obtained using the analytical model.",

author = "Kilani, {Mohammad I.} and Galambos, {Paul C.} and Haik, {Yousef S.} and Chen, {Ching Jen}",

year = "2003",

month = mar,

doi = "10.1115/1.1524582",

language = "English",

volume = "125",

pages = "339--344",

journal = "Journal of Fluids Engineering, Transactions of the ASME",

issn = "0098-2202",

publisher = "American Society of Mechanical Engineers(ASME)",

number = "2",

}

TY - JOUR

T1 - Design and analysis of a surface micromachined spiral-channel viscous pump

AU - Kilani, Mohammad I.

AU - Galambos, Paul C.

AU - Haik, Yousef S.

AU - Chen, Ching Jen

PY - 2003/3

Y1 - 2003/3

N2 - A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT), and presents an analytical solution of the flow field in its spiral channel. The pump characteristics are obtained experimentally for a scaled-up prototype and are found to be in good agreement with the results obtained using the analytical model.

AB - A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia's Ultraplanar Multilevel MEMS Technology (SUMMiT), and presents an analytical solution of the flow field in its spiral channel. The pump characteristics are obtained experimentally for a scaled-up prototype and are found to be in good agreement with the results obtained using the analytical model.

UR - http://www.scopus.com/inward/record.url?scp=0344088273&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0344088273&partnerID=8YFLogxK

U2 - 10.1115/1.1524582

DO - 10.1115/1.1524582

M3 - Article

AN - SCOPUS:0344088273

SN - 0098-2202

VL - 125

SP - 339

EP - 344

JO - Journal of Fluids Engineering, Transactions of the ASME

JF - Journal of Fluids Engineering, Transactions of the ASME

IS - 2

ER -

Design and analysis of a surface micromachined spiral-channel viscous pump

Abstract

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