Design to improve the capacitive contact quality in piezoelectric actuation

Hikmat Achkar, David Peyrou, Fabienne Pennec, Mahmoud Al Ahmad, Patrick Pons, Robert Plana

Research output: Contribution to journalConference articlepeer-review


RF MEMS switches with piezoelectric actuation permits us to obtain a reliable switch relative to electrostatic actuated switches since the dielectric charging is reduced and fast respond. The problem here is the deformation induced by the actuation is transmitted to the capacitor plate and by consequences: we lose in the value of capacitance in the down state due to the air gap. A study of the air pp effect on the capadtance value in the down state is done in the first part, showing the importance of flatness in capacitor plate designs. The design that is described in this paper, deals with the point of the application of the force in order to flatten the contact between the electrodes forming the capacitor. An analytical model describing the deformation of the switch was developed.

Original languageEnglish
Pages (from-to)3858-3861
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number12
Publication statusPublished - 2008
Externally publishedYes
Event3rd International Conference on Micro-Nanoelectronics, Nanotechnology and MEMs - Athens, Greece
Duration: Nov 18 2007Nov 21 2007

ASJC Scopus subject areas

  • Condensed Matter Physics


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