Efficient fabrication of low-damage, high-quality diamond microgrooves with high adhesion graphite-graphene layers on their surfaces using LIPAA technology

The fabrication of highly adhesive graphene layers on the surface of diamond microstructures can greatly promote the application of diamonds in high-performance sensors and ultra-precision manufacturing. However, this technology remains a significant challenge and is difficult to achieve efficient preparation. To overcome this challenge, the effect of target-substrate distance on microgroove morphology and material removal rate was investigated by ablating single crystal diamond using laser-induced plasma-assisted ablation (LIPAA) technology. Through precise target-substrate distance tuning, the efficient fabrication of low-damage, high-quality diamond microgrooves with high adhesion graphite-graphene layers on their surfaces has been achieved. The graphitization evolution on the surface of diamond microgrooves was detected using Raman and TEM, and the formation mechanism of graphite layer and graphene structure on the microgroove surface was analyzed by combining molecular dynamics (MD) simulation. An optimal target-substrate distance range was established for the efficient processing of diamond microgrooves with graphene attached to the surface through process optimization. These results offer valuable insights for advancing the application of single-crystal diamonds in sensor and semiconductor technologies.