Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Mohammad I. Kilani; Paul C. Galambos; Yousef S. Haik; Ching Jen Chen

Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Mohammad I. Kilani, Paul C. Galambos, Yousef S. Haik, Ching Jen Chen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced. The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

Original language	English
Title of host publication	Micro-Electro-Mechanical Systems (MEMS) - 2001
Editors	A.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Pages	515-518
Number of pages	4
Publication status	Published - 2001
Externally published	Yes
Event	2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States Duration: Nov 11 2001 → Nov 16 2001

Publication series

Name	American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
Volume	3

Other

Other	2001 ASME International Mechanical Engineering Congress and Exposition
Country/Territory	United States
City	New York, NY
Period	11/11/01 → 11/16/01

ASJC Scopus subject areas

General Engineering

Cite this

Kilani, M. I., Galambos, P. C., Haik, Y. S., & Chen, C. J. (2001). Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. In A. L. Lee, J. Simon, K. Breuer, S. Chen, R. S. Keynton, A. Malshe, J.-I. Mou, & M. Dunn (Eds.), Micro-Electro-Mechanical Systems (MEMS) - 2001 (pp. 515-518). (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); Vol. 3).

Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. / Kilani, Mohammad I.; Galambos, Paul C.; Haik, Yousef S. et al.
Micro-Electro-Mechanical Systems (MEMS) - 2001. ed. / A.L. Lee; J. Simon; K. Breuer; S. Chen; R.S. Keynton; A. Malshe; J.-I. Mou; M. Dunn. 2001. p. 515-518 (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kilani, MI, Galambos, PC, Haik, YS & Chen, CJ 2001, Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. in AL Lee, J Simon, K Breuer, S Chen, RS Keynton, A Malshe, J-I Mou & M Dunn (eds), Micro-Electro-Mechanical Systems (MEMS) - 2001. American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS), vol. 3, pp. 515-518, 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 11/11/01.

Kilani MI, Galambos PC, Haik YS, Chen CJ. Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. In Lee AL, Simon J, Breuer K, Chen S, Keynton RS, Malshe A, Mou JI, Dunn M, editors, Micro-Electro-Mechanical Systems (MEMS) - 2001. 2001. p. 515-518. (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)).

Kilani, Mohammad I. ; Galambos, Paul C. ; Haik, Yousef S. et al. / Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. Micro-Electro-Mechanical Systems (MEMS) - 2001. editor / A.L. Lee ; J. Simon ; K. Breuer ; S. Chen ; R.S. Keynton ; A. Malshe ; J.-I. Mou ; M. Dunn. 2001. pp. 515-518 (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)).

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abstract = "An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced. The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.",

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N2 - An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced. The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

AB - An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced. The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

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Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design

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