Electrostically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Mohammad I. Kilani; Paul C. Galambos; Yousef S. Haik; Ching Jen Chen

Electrostically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Mohammad I. Kilani, Paul C. Galambos, Yousef S. Haik, Ching Jen Chen

Research output: Contribution to conference › Paper › peer-review

Abstract

An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

Original language	English
Pages	3085-3090
Number of pages	6
Publication status	Published - 2001
Externally published	Yes
Event	2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States Duration: Nov 11 2001 → Nov 16 2001

Other

Other	2001 ASME International Mechanical Engineering Congress and Exposition
Country/Territory	United States
City	New York, NY
Period	11/11/01 → 11/16/01

ASJC Scopus subject areas

Engineering(all)

Cite this

@conference{544473b189c24b3a938f320d63b263b7,

title = "Electrostically Actuated Surface Micromachined Offset Planetary Gear Pump Design",

abstract = "An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.",

author = "Kilani, {Mohammad I.} and Galambos, {Paul C.} and Haik, {Yousef S.} and Chen, {Ching Jen}",

year = "2001",

language = "English",

pages = "3085--3090",

note = "2001 ASME International Mechanical Engineering Congress and Exposition ; Conference date: 11-11-2001 Through 16-11-2001",

}

TY - CONF

T1 - Electrostically Actuated Surface Micromachined Offset Planetary Gear Pump Design

AU - Kilani, Mohammad I.

AU - Galambos, Paul C.

AU - Haik, Yousef S.

AU - Chen, Ching Jen

PY - 2001

Y1 - 2001

N2 - An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

AB - An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

UR - http://www.scopus.com/inward/record.url?scp=1542411501&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1542411501&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:1542411501

SP - 3085

EP - 3090

T2 - 2001 ASME International Mechanical Engineering Congress and Exposition

Y2 - 11 November 2001 through 16 November 2001

ER -

Electrostically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Abstract

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ASJC Scopus subject areas

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