Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

Ehsan Mohammadpour, Willey Yun Hsien Liew, Nicholas Mondinos, Mohammednoor Altarawneh, Sunghwan Lee, Nik Radevski, Manickam Minakshi, Amun Amri, Hong Ngee Lim, Zhong Tao Jiang

Research output: Contribution to journalArticlepeer-review

Abstract

This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology and mechanical (hardness, Young's modulus, residual stresses) properties, of the deposited TiSiN coatings, were investigated with synchrotron powered X-ray diffraction (SR-XRD), X-ray photoelectron spectroscopy, field emission scanning electron microscopy, and nanoindentation techniques. Rietveld analysis, of the in-situ SR-XRD, in the temperature range of 25–800 °C, demonstrated cubic TiN form in (Ti,Si)N solid solutions, with TiO2 and Ti2O3 identified at lower bias voltages. Density functional theory supplemented the experimental results. Increase in the bias voltage resulted in: (i) a decrease in Si content, (ii) significant smoothening of surface morphology, (iii) change in the phase composition and microstructure, (iv) improved oxidation resistance and thermal oxidation threshold, and (v) hardness and Young's modulus of the coatings increased up to 50% to 33 GPa and 450 GPa, respectively.

Original languageEnglish
Pages (from-to)1122-1131
Number of pages10
JournalJournal of Materials Research and Technology
Volume17
DOIs
Publication statusPublished - Mar 1 2022

Keywords

  • Bias voltage
  • Mechanical properties
  • Oxidation
  • Synchrotron radiation
  • Thermal stability
  • TiSiN

ASJC Scopus subject areas

  • Ceramics and Composites
  • Biomaterials
  • Surfaces, Coatings and Films
  • Metals and Alloys

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