Experimental and simulational study of the operation conditions for a high transmission mass filter

A. I. Ayesh; A. Lassesson; S. A. Brown; A. D.F. Dunbar; M. Kaufmann; J. G. Partridge; R. Reichel; J. Van Lith

doi:10.1063/1.2740121

Experimental and simulational study of the operation conditions for a high transmission mass filter

A. I. Ayesh, A. Lassesson, S. A. Brown, A. D.F. Dunbar, M. Kaufmann, J. G. Partridge, R. Reichel, J. Van Lith

Department of Physics

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

The operation conditions of a double pulsed field mass filter were studied using both experiment and simulation. The mass filter consists of two pairs of parallel plates and operates on the time-of-flight principle. The study showed that the ions' beam deflection angle is a critical factor in optimizing the mass filter transmission efficiency. This angle is dependent on the accelerating voltage, ion mass, and horizontal velocity of the ions. The optimum operating conditions for the mass filter were found and used to study the mass distribution of palladium ions produced by a magnetron sputtering source. The study shows that this mass filter is suitable for technological applications because of its high transmission and wide mass range.

Original language	English
Article number	053906
Journal	Review of Scientific Instruments
Volume	78
Issue number	5
DOIs	https://doi.org/10.1063/1.2740121
Publication status	Published - 2007

ASJC Scopus subject areas

Instrumentation

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title = "Experimental and simulational study of the operation conditions for a high transmission mass filter",

abstract = "The operation conditions of a double pulsed field mass filter were studied using both experiment and simulation. The mass filter consists of two pairs of parallel plates and operates on the time-of-flight principle. The study showed that the ions' beam deflection angle is a critical factor in optimizing the mass filter transmission efficiency. This angle is dependent on the accelerating voltage, ion mass, and horizontal velocity of the ions. The optimum operating conditions for the mass filter were found and used to study the mass distribution of palladium ions produced by a magnetron sputtering source. The study shows that this mass filter is suitable for technological applications because of its high transmission and wide mass range.",

author = "Ayesh, {A. I.} and A. Lassesson and Brown, {S. A.} and Dunbar, {A. D.F.} and M. Kaufmann and Partridge, {J. G.} and R. Reichel and {Van Lith}, J.",

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AU - Ayesh, A. I.

AU - Lassesson, A.

AU - Brown, S. A.

AU - Dunbar, A. D.F.

AU - Kaufmann, M.

AU - Partridge, J. G.

AU - Reichel, R.

AU - Van Lith, J.

PY - 2007

Y1 - 2007

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AB - The operation conditions of a double pulsed field mass filter were studied using both experiment and simulation. The mass filter consists of two pairs of parallel plates and operates on the time-of-flight principle. The study showed that the ions' beam deflection angle is a critical factor in optimizing the mass filter transmission efficiency. This angle is dependent on the accelerating voltage, ion mass, and horizontal velocity of the ions. The optimum operating conditions for the mass filter were found and used to study the mass distribution of palladium ions produced by a magnetron sputtering source. The study shows that this mass filter is suitable for technological applications because of its high transmission and wide mass range.

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Experimental and simulational study of the operation conditions for a high transmission mass filter

Abstract

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