Fabrication and characterization of aluminum nitride nanoparticles by RF magnetron sputtering and inert gas condensation technique

Ishaq Musa; Naser Qamhieh; Khadija Said; Saleh T. Mahmoud; Hussain Alawadhi

doi:10.3390/coatings10040411

Fabrication and characterization of aluminum nitride nanoparticles by RF magnetron sputtering and inert gas condensation technique

Ishaq Musa, Naser Qamhieh, Khadija Said, Saleh T. Mahmoud, Hussain Alawadhi

Department of Physics

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Aluminum nitride nanoparticles (AlN-NPs) were fabricated by a RF magnetron sputtering and inert gas condensation technique. By keeping the source parameters and sputtering time of 4 h fixed, it was possible to produce AlN-NPs with a size in the range of 2-3 nm. Atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD), and UV-visible absorption were used to characterize the obtained AlN-NPs. AFMtopography images showed quazi-sphere nanoparticles with a size ranging from 2 to 3 nm. The XRD measurements confirmed the hexagonal wurtzite structure of AlN nanoparticles. Furthermore, the optical band gap was determined by the UV-visible absorption spectroscopy. The Raman spectroscopy results showed vibration transverse-optical modes A1(TO), E1(TO), as well as longitudinal-optical modes E₁(LO), A₁(LO).

Original language	English
Article number	411
Journal	Coatings
Volume	10
Issue number	4
DOIs	https://doi.org/10.3390/coatings10040411
Publication status	Published - Apr 1 2020

Keywords

AlN nanoparticles
Atomic force microscopy
RF magnetron sputtering
Raman spectroscopy
UV-visible absorption

ASJC Scopus subject areas

Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.3390/coatings10040411

Cite this

@article{d474aee4928c47dc84c1c65f34df2b46,

title = "Fabrication and characterization of aluminum nitride nanoparticles by RF magnetron sputtering and inert gas condensation technique",

abstract = "Aluminum nitride nanoparticles (AlN-NPs) were fabricated by a RF magnetron sputtering and inert gas condensation technique. By keeping the source parameters and sputtering time of 4 h fixed, it was possible to produce AlN-NPs with a size in the range of 2-3 nm. Atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD), and UV-visible absorption were used to characterize the obtained AlN-NPs. AFMtopography images showed quazi-sphere nanoparticles with a size ranging from 2 to 3 nm. The XRD measurements confirmed the hexagonal wurtzite structure of AlN nanoparticles. Furthermore, the optical band gap was determined by the UV-visible absorption spectroscopy. The Raman spectroscopy results showed vibration transverse-optical modes A1(TO), E1(TO), as well as longitudinal-optical modes E1(LO), A1(LO).",

keywords = "AlN nanoparticles, Atomic force microscopy, RF magnetron sputtering, Raman spectroscopy, UV-visible absorption",

author = "Ishaq Musa and Naser Qamhieh and Khadija Said and Mahmoud, {Saleh T.} and Hussain Alawadhi",

note = "Publisher Copyright: {\textcopyright} 2020 by the authors.",

year = "2020",

month = apr,

day = "1",

doi = "10.3390/coatings10040411",

language = "English",

volume = "10",

journal = "Coatings",

issn = "2079-6412",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "4",

}

TY - JOUR

T1 - Fabrication and characterization of aluminum nitride nanoparticles by RF magnetron sputtering and inert gas condensation technique

AU - Musa, Ishaq

AU - Qamhieh, Naser

AU - Said, Khadija

AU - Mahmoud, Saleh T.

AU - Alawadhi, Hussain

PY - 2020/4/1

Y1 - 2020/4/1

N2 - Aluminum nitride nanoparticles (AlN-NPs) were fabricated by a RF magnetron sputtering and inert gas condensation technique. By keeping the source parameters and sputtering time of 4 h fixed, it was possible to produce AlN-NPs with a size in the range of 2-3 nm. Atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD), and UV-visible absorption were used to characterize the obtained AlN-NPs. AFMtopography images showed quazi-sphere nanoparticles with a size ranging from 2 to 3 nm. The XRD measurements confirmed the hexagonal wurtzite structure of AlN nanoparticles. Furthermore, the optical band gap was determined by the UV-visible absorption spectroscopy. The Raman spectroscopy results showed vibration transverse-optical modes A1(TO), E1(TO), as well as longitudinal-optical modes E1(LO), A1(LO).

AB - Aluminum nitride nanoparticles (AlN-NPs) were fabricated by a RF magnetron sputtering and inert gas condensation technique. By keeping the source parameters and sputtering time of 4 h fixed, it was possible to produce AlN-NPs with a size in the range of 2-3 nm. Atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD), and UV-visible absorption were used to characterize the obtained AlN-NPs. AFMtopography images showed quazi-sphere nanoparticles with a size ranging from 2 to 3 nm. The XRD measurements confirmed the hexagonal wurtzite structure of AlN nanoparticles. Furthermore, the optical band gap was determined by the UV-visible absorption spectroscopy. The Raman spectroscopy results showed vibration transverse-optical modes A1(TO), E1(TO), as well as longitudinal-optical modes E1(LO), A1(LO).

KW - AlN nanoparticles

KW - Atomic force microscopy

KW - RF magnetron sputtering

KW - Raman spectroscopy

KW - UV-visible absorption

UR - http://www.scopus.com/inward/record.url?scp=85083831778&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85083831778&partnerID=8YFLogxK

U2 - 10.3390/coatings10040411

DO - 10.3390/coatings10040411

M3 - Article

AN - SCOPUS:85083831778

SN - 2079-6412

VL - 10

JO - Coatings

JF - Coatings

IS - 4

M1 - 411

ER -

Fabrication and characterization of aluminum nitride nanoparticles by RF magnetron sputtering and inert gas condensation technique

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this