TY - JOUR
T1 - Fabrication of array microstructures using serial and parallel localized electrodeposition
AU - Said, Ra'A
AU - Alshwawreh, Nidal
AU - Haik, Yousef
N1 - Funding Information:
The authors want to thank the Graduate Studies and Research Affairs at United Arab Emirates University for financing the project. Also the authors want to thank Central Laboratory Unit in the University for providing the SEM images. The authors also want to thank ANSOFT Corporation for providing the free simulation software.
PY - 2009/6
Y1 - 2009/6
N2 - To add to the development efforts in enhancing the capabilities of localized electrodeposition (LED) fabrication technique, this paper presents serial and parallel deposition algorithms to fabricate array microstructures. Such arrays can be implemented as microsensors in neural recording applications or as antenna arrays in ultra high frequency applications. Also, magnetic tip microarrays for tissue engineering can be realized. In the case of serial fabrication, an array of high aspect ratio microstructures is realized using the conventional single-tip microelectrode while implementing a multistep fabrication algorithm. In this algorithm, the fabricated microstructure elements within the array are realized one at a time. In the parallel deposition algorithm, the array is realized using a multitip array microelectrode while implementing a single step fabrication algorithm. In this algorithm, the microstructure elements within the array are fabricated simultaneously. The proposed algorithms are compared through a demonstration of fabricated array microstructures.
AB - To add to the development efforts in enhancing the capabilities of localized electrodeposition (LED) fabrication technique, this paper presents serial and parallel deposition algorithms to fabricate array microstructures. Such arrays can be implemented as microsensors in neural recording applications or as antenna arrays in ultra high frequency applications. Also, magnetic tip microarrays for tissue engineering can be realized. In the case of serial fabrication, an array of high aspect ratio microstructures is realized using the conventional single-tip microelectrode while implementing a multistep fabrication algorithm. In this algorithm, the fabricated microstructure elements within the array are realized one at a time. In the parallel deposition algorithm, the array is realized using a multitip array microelectrode while implementing a single step fabrication algorithm. In this algorithm, the microstructure elements within the array are fabricated simultaneously. The proposed algorithms are compared through a demonstration of fabricated array microstructures.
KW - Array electrodes
KW - Micro-/nanofabrication
KW - Serial/parallel localized electrodeposition
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U2 - 10.1142/S0219581X09006109
DO - 10.1142/S0219581X09006109
M3 - Article
AN - SCOPUS:71749109365
SN - 0219-581X
VL - 8
SP - 323
EP - 332
JO - International Journal of Nanoscience
JF - International Journal of Nanoscience
IS - 3
ER -