Fabrication of microfluidic devices with 3D embedded flow-invasive microelements

Bobby Mathew; Anas Alazzam; Saud Khashan; Ion Stiharu; Sawsan Dagher; Edward P. Furlani

doi:10.1016/j.mee.2017.11.013

Fabrication of microfluidic devices with 3D embedded flow-invasive microelements

Bobby Mathew, Anas Alazzam, Saud Khashan, Ion Stiharu, Sawsan Dagher, Edward P. Furlani

Department of Mechanical and Aerospace Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A process is demonstrated for fabricating microfluidic devices with pre-fabricated microelements embedded within a microchannel orthogonal to the flow. The microelements constitute a functional three-dimensional (3D) structure that can be used for a broad range of applications. The process is demonstrated using PDMS and glass and conventional microfabrication processes. The use of this process for applications of dielectrophoresis and magnetophoresis is discussed.

Original language	English
Pages (from-to)	27-32
Number of pages	6
Journal	Microelectronic Engineering
Volume	187-188
DOIs	https://doi.org/10.1016/j.mee.2017.11.013
Publication status	Published - Feb 5 2018

Keywords

3D microelements
Dielectrophoresis
Flow invasive microelements
Magnetophoresis
Microfabrication

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2017.11.013

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abstract = "A process is demonstrated for fabricating microfluidic devices with pre-fabricated microelements embedded within a microchannel orthogonal to the flow. The microelements constitute a functional three-dimensional (3D) structure that can be used for a broad range of applications. The process is demonstrated using PDMS and glass and conventional microfabrication processes. The use of this process for applications of dielectrophoresis and magnetophoresis is discussed.",

keywords = "3D microelements, Dielectrophoresis, Flow invasive microelements, Magnetophoresis, Microfabrication",

author = "Bobby Mathew and Anas Alazzam and Saud Khashan and Ion Stiharu and Sawsan Dagher and Furlani, {Edward P.}",

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doi = "10.1016/j.mee.2017.11.013",

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T1 - Fabrication of microfluidic devices with 3D embedded flow-invasive microelements

AU - Mathew, Bobby

AU - Alazzam, Anas

AU - Khashan, Saud

AU - Stiharu, Ion

AU - Dagher, Sawsan

AU - Furlani, Edward P.

PY - 2018/2/5

Y1 - 2018/2/5

N2 - A process is demonstrated for fabricating microfluidic devices with pre-fabricated microelements embedded within a microchannel orthogonal to the flow. The microelements constitute a functional three-dimensional (3D) structure that can be used for a broad range of applications. The process is demonstrated using PDMS and glass and conventional microfabrication processes. The use of this process for applications of dielectrophoresis and magnetophoresis is discussed.

AB - A process is demonstrated for fabricating microfluidic devices with pre-fabricated microelements embedded within a microchannel orthogonal to the flow. The microelements constitute a functional three-dimensional (3D) structure that can be used for a broad range of applications. The process is demonstrated using PDMS and glass and conventional microfabrication processes. The use of this process for applications of dielectrophoresis and magnetophoresis is discussed.

KW - 3D microelements

KW - Dielectrophoresis

KW - Flow invasive microelements

KW - Magnetophoresis

KW - Microfabrication

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VL - 187-188

SP - 27

EP - 32

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Fabrication of microfluidic devices with 3D embedded flow-invasive microelements

Abstract

Keywords

ASJC Scopus subject areas

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