Fabrication of microfluidic devices with 3D embedded flow-invasive microelements

Bobby Mathew, Anas Alazzam, Saud Khashan, Ion Stiharu, Sawsan Dagher, Edward P. Furlani

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


A process is demonstrated for fabricating microfluidic devices with pre-fabricated microelements embedded within a microchannel orthogonal to the flow. The microelements constitute a functional three-dimensional (3D) structure that can be used for a broad range of applications. The process is demonstrated using PDMS and glass and conventional microfabrication processes. The use of this process for applications of dielectrophoresis and magnetophoresis is discussed.

Original languageEnglish
Pages (from-to)27-32
Number of pages6
JournalMicroelectronic Engineering
Publication statusPublished - Feb 5 2018


  • 3D microelements
  • Dielectrophoresis
  • Flow invasive microelements
  • Magnetophoresis
  • Microfabrication

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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