Fabrication of NdFeB thin film and its application in MEMS

Pan Zheng, Mohammad Kilani, Yousef S. Haik, Ching Jen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages4
ISBN (Print)0791836428, 9780791836422
Publication statusPublished - 2002
Externally publishedYes

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

ASJC Scopus subject areas

  • Mechanical Engineering


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