TY - GEN
T1 - Fabrication of NdFeB thin film and its application in MEMS
AU - Zheng, Pan
AU - Kilani, Mohammad
AU - Haik, Yousef S.
AU - Chen, Ching Jen
PY - 2002
Y1 - 2002
N2 - The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.
AB - The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.
UR - http://www.scopus.com/inward/record.url?scp=78249248998&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78249248998&partnerID=8YFLogxK
U2 - 10.1115/IMECE2002-33401
DO - 10.1115/IMECE2002-33401
M3 - Conference contribution
AN - SCOPUS:78249248998
SN - 0791836428
SN - 9780791836422
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 401
EP - 404
BT - Microelectromechanical Systems
PB - American Society of Mechanical Engineers (ASME)
ER -