Focused ion beam induced deposition of superconducting thin films

E. S. Sadki, S. Ooi, K. Hirata

Research output: Contribution to journalConference articlepeer-review

15 Citations (Scopus)


Superconducting thin films have been deposited using gallium focused ion beam with tungsten carboxyl W(CO)6 as precursor. The composition of the films is investigated by electron probe microanalysis (EPMA), which shows atomic concentrations of about 40%, 40%, and 20% of tungsten, carbon, and gallium, respectively. From resistivity and magnetic measurements, the superconducting critical temperature is 5.2 K. Furthermore, the upper critical fields and coherence length, are deduced from resistivity data measured at different applied magnetic fields, and have zero Kelvin values of 9.5 T and 5.9 nm, respectively. This technique can be used as a template-free fabrication method for superconducting circuits and devices.

Original languageEnglish
Pages (from-to)1547-1551
Number of pages5
JournalPhysica C: Superconductivity and its applications
Issue numberII
Publication statusPublished - 2005
Externally publishedYes
EventProceedings of the 17th Internatioanl Symposium on Superconductivity (ISS 2004) Advances in Superconductivity -
Duration: Nov 23 2004Nov 25 2004


  • FIB
  • IBID
  • Superconducting devices
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


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