Focused ion beam induced deposition of superconducting thin films

E. S. Sadki; S. Ooi; K. Hirata

doi:10.1016/j.physc.2005.02.151

Focused ion beam induced deposition of superconducting thin films

E. S. Sadki, S. Ooi, K. Hirata

Research output: Contribution to journal › Conference article › peer-review

14 Citations (Scopus)

Abstract

Superconducting thin films have been deposited using gallium focused ion beam with tungsten carboxyl W(CO)₆ as precursor. The composition of the films is investigated by electron probe microanalysis (EPMA), which shows atomic concentrations of about 40%, 40%, and 20% of tungsten, carbon, and gallium, respectively. From resistivity and magnetic measurements, the superconducting critical temperature is 5.2 K. Furthermore, the upper critical fields and coherence length, are deduced from resistivity data measured at different applied magnetic fields, and have zero Kelvin values of 9.5 T and 5.9 nm, respectively. This technique can be used as a template-free fabrication method for superconducting circuits and devices.

Original language	English
Pages (from-to)	1547-1551
Number of pages	5
Journal	Physica C: Superconductivity and its applications
Volume	426-431
Issue number	II
DOIs	https://doi.org/10.1016/j.physc.2005.02.151
Publication status	Published - 2005
Externally published	Yes
Event	Proceedings of the 17th Internatioanl Symposium on Superconductivity (ISS 2004) Advances in Superconductivity - Duration: Nov 23 2004 → Nov 25 2004

Keywords

FIB
IBID
Superconducting devices
Thin films

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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10.1016/j.physc.2005.02.151

Cite this

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title = "Focused ion beam induced deposition of superconducting thin films",

abstract = "Superconducting thin films have been deposited using gallium focused ion beam with tungsten carboxyl W(CO)6 as precursor. The composition of the films is investigated by electron probe microanalysis (EPMA), which shows atomic concentrations of about 40%, 40%, and 20% of tungsten, carbon, and gallium, respectively. From resistivity and magnetic measurements, the superconducting critical temperature is 5.2 K. Furthermore, the upper critical fields and coherence length, are deduced from resistivity data measured at different applied magnetic fields, and have zero Kelvin values of 9.5 T and 5.9 nm, respectively. This technique can be used as a template-free fabrication method for superconducting circuits and devices.",

keywords = "FIB, IBID, Superconducting devices, Thin films",

author = "Sadki, {E. S.} and S. Ooi and K. Hirata",

year = "2005",

doi = "10.1016/j.physc.2005.02.151",

language = "English",

volume = "426-431",

pages = "1547--1551",

journal = "Physica C: Superconductivity and its applications",

issn = "0921-4534",

publisher = "Elsevier",

number = "II",

note = "Proceedings of the 17th Internatioanl Symposium on Superconductivity (ISS 2004) Advances in Superconductivity ; Conference date: 23-11-2004 Through 25-11-2004",

}

TY - JOUR

T1 - Focused ion beam induced deposition of superconducting thin films

AU - Sadki, E. S.

AU - Ooi, S.

AU - Hirata, K.

PY - 2005

Y1 - 2005

N2 - Superconducting thin films have been deposited using gallium focused ion beam with tungsten carboxyl W(CO)6 as precursor. The composition of the films is investigated by electron probe microanalysis (EPMA), which shows atomic concentrations of about 40%, 40%, and 20% of tungsten, carbon, and gallium, respectively. From resistivity and magnetic measurements, the superconducting critical temperature is 5.2 K. Furthermore, the upper critical fields and coherence length, are deduced from resistivity data measured at different applied magnetic fields, and have zero Kelvin values of 9.5 T and 5.9 nm, respectively. This technique can be used as a template-free fabrication method for superconducting circuits and devices.

AB - Superconducting thin films have been deposited using gallium focused ion beam with tungsten carboxyl W(CO)6 as precursor. The composition of the films is investigated by electron probe microanalysis (EPMA), which shows atomic concentrations of about 40%, 40%, and 20% of tungsten, carbon, and gallium, respectively. From resistivity and magnetic measurements, the superconducting critical temperature is 5.2 K. Furthermore, the upper critical fields and coherence length, are deduced from resistivity data measured at different applied magnetic fields, and have zero Kelvin values of 9.5 T and 5.9 nm, respectively. This technique can be used as a template-free fabrication method for superconducting circuits and devices.

KW - FIB

KW - IBID

KW - Superconducting devices

KW - Thin films

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U2 - 10.1016/j.physc.2005.02.151

DO - 10.1016/j.physc.2005.02.151

M3 - Conference article

AN - SCOPUS:25444497991

SN - 0921-4534

VL - 426-431

SP - 1547

EP - 1551

JO - Physica C: Superconductivity and its applications

JF - Physica C: Superconductivity and its applications

IS - II

T2 - Proceedings of the 17th Internatioanl Symposium on Superconductivity (ISS 2004) Advances in Superconductivity

Y2 - 23 November 2004 through 25 November 2004

ER -

Focused ion beam induced deposition of superconducting thin films

Abstract

Keywords

ASJC Scopus subject areas

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