Fully integrated CMOS capacitive sensor for Lab-on-Chip applications

Ghazal Nabovati; Ebrahim Ghafar-Zadeh; Maryam Mirzaei; Giancarlo Ayala-Charca; Falah Awwad; Mohamad Sawan

doi:10.1109/ISCAS.2014.6865108

Fully integrated CMOS capacitive sensor for Lab-on-Chip applications

Ghazal Nabovati, Ebrahim Ghafar-Zadeh, Maryam Mirzaei, Giancarlo Ayala-Charca, Falah Awwad, Mohamad Sawan

Department of Electrical and Communication Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We present a new Charge Based Capacitance Measurement (CBCM) CMOS sensor for Lab-on-Chip applications. This integrated capacitive sensor consists of a fully differential capacitance to voltage converter, a sigma delta (ΣΔ) modulator, and interdigitated electrodes realized on top metal layer in 0.35 μm CMOS process. The proposed CMOS capacitive sensor offers higher dynamic-range (10 fF) and sensitivity (350 mV/fF) in comparison to our previously reported core-CBCM capacitive sensors. We proved this significant improvement by demonstrating the chemical solvent concentration measurements and discussing the potential applications in environmental monitoring and water safety applications.

Original language	English
Title of host publication	2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	233-236
Number of pages	4
ISBN (Print)	9781479934324
DOIs	https://doi.org/10.1109/ISCAS.2014.6865108
Publication status	Published - 2014
Event	2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014 - Melbourne, VIC, Australia Duration: Jun 1 2014 → Jun 5 2014

Publication series

Name	Proceedings - IEEE International Symposium on Circuits and Systems
ISSN (Print)	0271-4310

Other

Other	2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014
Country/Territory	Australia
City	Melbourne, VIC
Period	6/1/14 → 6/5/14

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ISCAS.2014.6865108

Cite this

Nabovati, G., Ghafar-Zadeh, E., Mirzaei, M., Ayala-Charca, G., Awwad, F., & Sawan, M. (2014). Fully integrated CMOS capacitive sensor for Lab-on-Chip applications. In 2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014 (pp. 233-236). Article 6865108 (Proceedings - IEEE International Symposium on Circuits and Systems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISCAS.2014.6865108

Fully integrated CMOS capacitive sensor for Lab-on-Chip applications. / Nabovati, Ghazal; Ghafar-Zadeh, Ebrahim; Mirzaei, Maryam et al.
2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 233-236 6865108 (Proceedings - IEEE International Symposium on Circuits and Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nabovati, G, Ghafar-Zadeh, E, Mirzaei, M, Ayala-Charca, G, Awwad, F & Sawan, M 2014, Fully integrated CMOS capacitive sensor for Lab-on-Chip applications. in 2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014., 6865108, Proceedings - IEEE International Symposium on Circuits and Systems, Institute of Electrical and Electronics Engineers Inc., pp. 233-236, 2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014, Melbourne, VIC, Australia, 6/1/14. https://doi.org/10.1109/ISCAS.2014.6865108

Nabovati G, Ghafar-Zadeh E, Mirzaei M, Ayala-Charca G, Awwad F, Sawan M. Fully integrated CMOS capacitive sensor for Lab-on-Chip applications. In 2014 IEEE International Symposium on Circuits and Systems, ISCAS 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 233-236. 6865108. (Proceedings - IEEE International Symposium on Circuits and Systems). doi: 10.1109/ISCAS.2014.6865108

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abstract = "We present a new Charge Based Capacitance Measurement (CBCM) CMOS sensor for Lab-on-Chip applications. This integrated capacitive sensor consists of a fully differential capacitance to voltage converter, a sigma delta (ΣΔ) modulator, and interdigitated electrodes realized on top metal layer in 0.35 μm CMOS process. The proposed CMOS capacitive sensor offers higher dynamic-range (10 fF) and sensitivity (350 mV/fF) in comparison to our previously reported core-CBCM capacitive sensors. We proved this significant improvement by demonstrating the chemical solvent concentration measurements and discussing the potential applications in environmental monitoring and water safety applications.",

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AB - We present a new Charge Based Capacitance Measurement (CBCM) CMOS sensor for Lab-on-Chip applications. This integrated capacitive sensor consists of a fully differential capacitance to voltage converter, a sigma delta (ΣΔ) modulator, and interdigitated electrodes realized on top metal layer in 0.35 μm CMOS process. The proposed CMOS capacitive sensor offers higher dynamic-range (10 fF) and sensitivity (350 mV/fF) in comparison to our previously reported core-CBCM capacitive sensors. We proved this significant improvement by demonstrating the chemical solvent concentration measurements and discussing the potential applications in environmental monitoring and water safety applications.

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Fully integrated CMOS capacitive sensor for Lab-on-Chip applications

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