Gecko inspired electrostatic chuck

Jose Berengueres, Masataka Urago, Shigeki Saito, Kenjiro Tadakuma, Hiroyuki Meguro

Research output: Chapter in Book/Report/Conference proceedingConference contribution

21 Citations (Scopus)

Abstract

We introduce a climbing system, inspired by gecko foot that uses Electrostatic Chuck (ESC) in place of Van der Waals interaction. Electrostatic chucks are currently used in wafer foundries to pick-up and move delicate thin semiconductor wafers. The properties of ESC make it an interesting adhesion force for wall mobility applications. However the great dependency of current ESCs' adhesion force on the surface roughness of the substrate renders them ineffective in "normal-roughness" walls. By combining ESC adhesion with gecko's foot-hair surface-roughness adaptability function we propose a device for wall mobility applications.

Original languageEnglish
Title of host publication2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006
Pages1018-1023
Number of pages6
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006 - Kunming, China
Duration: Dec 17 2006Dec 20 2006

Publication series

Name2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006

Other

Other2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006
Country/TerritoryChina
CityKunming
Period12/17/0612/20/06

Keywords

  • Climbing
  • Distributed adhesion
  • ESC
  • Electrostatic chuck
  • Gecko
  • Surface roughness
  • Van der Waals force
  • Wall

ASJC Scopus subject areas

  • Artificial Intelligence
  • Electrical and Electronic Engineering

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