TY - GEN
T1 - Investigation of the formation mechanisms of Pd nanoclusters produced using a magnetron sputtering source
AU - Ayesh, A. I.
AU - Thaker, S.
AU - Qamhieh, N.
AU - Ghamlouche, H.
PY - 2011
Y1 - 2011
N2 - We report on the fabrication of palladium (Pd) nanoclusters using a dc magnetron sputtering source. The sputtering source produces ionized nanoclusters that enable the study of the nanoclusters' size distribution using a quadrupole mass filter. In this work, the dependence of Pd nanoclusters' size distribution on various source parameters, such as the inert gas flow rate, and aggregation length have been investigated in details. This work demonstrates the ability of tuning the palladium nanoclusters' size by proper optimization of the source operation conditions.
AB - We report on the fabrication of palladium (Pd) nanoclusters using a dc magnetron sputtering source. The sputtering source produces ionized nanoclusters that enable the study of the nanoclusters' size distribution using a quadrupole mass filter. In this work, the dependence of Pd nanoclusters' size distribution on various source parameters, such as the inert gas flow rate, and aggregation length have been investigated in details. This work demonstrates the ability of tuning the palladium nanoclusters' size by proper optimization of the source operation conditions.
KW - And nanocluster size selection
KW - Pd nanoclusters
KW - Sputtering
UR - http://www.scopus.com/inward/record.url?scp=80053000553&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80053000553&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.324.145
DO - 10.4028/www.scientific.net/AMR.324.145
M3 - Conference contribution
AN - SCOPUS:80053000553
SN - 9783037852293
T3 - Advanced Materials Research
SP - 145
EP - 148
BT - Advances in Innovative Materials and Applications
T2 - 1st Mediterranean Conference on Innovative Materials and Applications, CIMA 2011
Y2 - 15 March 2011 through 17 March 2011
ER -