MEMS Heat Exchangers

B. Mathew, L. Weiss

Research output: Chapter in Book/Report/Conference proceedingChapter

20 Citations (Scopus)


This chapter provides an overview of MEMS heat exchangers, specifically state of the art and design. The MEMS heat exchangers considered in this chapter include heat sinks, heat pipes, and two-fluid heat exchangers. The chapter starts by introducing several fundamental concepts of thermodynamics, fluid mechanics, and heat transfer that are relevant to MEMS heat exchangers. This is followed by sections specifically dedicated to each of the three MEMS heat exchanger types. Equations for preliminary design of the different MEMS heat exchangers are provided in sections dedicated to the same. The last section of this chapter provides an in-depth analytical treatment that demonstrates the merits of employing microscale internal flow passages in heat transfer devices.

Original languageEnglish
Title of host publicationMaterials and Failures in MEMS and NEMS
Number of pages58
ISBN (Electronic)9781119083887
ISBN (Print)9781119083603
Publication statusPublished - Sept 20 2015
Externally publishedYes


  • Analytical equations
  • Capillary effect
  • Heat pipes
  • Heat sinks
  • MEMS
  • Microchannels
  • Modeling
  • One-dimensional equations
  • Two-fluid heat exchangers

ASJC Scopus subject areas

  • General Engineering


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