Microfabrication of multi-layered electrodes for dielectrophoresis-based field flow fractionation

Bobby Mathew, Anas Alazzam, Saud A. Khashan

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This article details the process layout required for realizing a three-dimensional arrangement of electrodes in a microfluidic device for field flow fractionation based on dielectrophoresis. The metal electrodes are placed horizontally, in a stair-case arrangement, and pass through the bulk of the fluid. Several standard microfabrication processes are employed, in realizing this microdevice, including multi-layer photolithography, casting and plasma bonding. Thus the process layout is repeatable and reproducible. The feasibility of this process layout is demonstrated using three electrodes arranged in aforementioned manner; nevertheless, this process can be extended to as many electrodes as desired in the horizontal direction. This process layout can will make applications possible that were not possible till date due to the inability in microfabricating three-dimensional horizontal metal electrodes that run through the entire width of the microchannel.

Original languageEnglish
Title of host publicationBio-MEMS and Medical Microdevices II
EditorsSander van den Driesche
ISBN (Electronic)9781628416411
Publication statusPublished - 2015
EventBio-MEMS and Medical Microdevices II Conference - Barcelona, Spain
Duration: May 5 2015May 6 2015

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
ISSN (Print)1605-7422


OtherBio-MEMS and Medical Microdevices II Conference


  • dielectrophoresis
  • field flow fractionation
  • microchannel
  • microfabrication
  • three-dimensional electrodes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging


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