The electro-active polymers smart materials are typically characterized by their large strain, low modulus, and high compliance which make them suitable and of efficient use in area of actuation. Dielectric electroactive polymer (DEAP) actuators combine high energy density with large displacements, low power consumption and fast response time, which make them very attractive for a wide variety of applications, both on the macro- and micro-scale. The design and fabrication of a proper actuator for micro pump and micro mirror applications requires an explicit knowledge of the involving materials as well as the miniaturizations techniques. The prediction of the mechanical behavior when dc bias is applied is often performed thought the help of suitable multi-physics tools. These tools generally based on the finite element analysis algorithms. The results of these simulations will provide quantitative characterizations concerning the actuation spatial resolution, and also allows optimizing the fabrication process in terms of materials and integrations steps. The scope of this work is to shows how a multi-physics tool such as CoventorWare is used to anticipate the electromechanical behaviour of micro actuator comprising a PDMS material for actuation. The simulation investigates the electromechanical coupling in the dielectric elastomer actuators.