Piezoelectric materials for advanced integrated RF components

Mahmoud Al Ahmad, Fabio Coccetti, Robert Plana

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper will first address the piezoelectric material characterization using a capacitance measurement technique. An original simple and efficient technique for the determination of the |d33| piezoelectric coefficient of lead zirconate titanate thin fims is described. Classical capacitor plate theory and piezoelectric material analysis are used to calculate the capacitance variation in lead zirconate titanate film, enabling piezoelectric coefficient to be determined. The technique outlined here avoids the use of mechanical/optical apparatus that may require heavy preparation of sample substrate geometry. Then, this work also treats design and fabrication issues associated with innovative tunable front-end components which combine two different ceramic technologies, namely multilayer ceramic circuit boards (low temperature colored ceramics or LTCC) and piezoelectric actuator technology within a single device.

Original languageEnglish
Title of host publicationPassive and Electromechanical Materials and Integration
PublisherMaterials Research Society
Number of pages12
ISBN (Print)9781605608570
Publication statusPublished - 2008
Externally publishedYes
Event2008 MRS Spring Meeting - San Francisco, CA, United States
Duration: Mar 24 2008Mar 28 2008

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Other2008 MRS Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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