TY - GEN
T1 - Piezoelectric materials for advanced integrated RF components
AU - Al Ahmad, Mahmoud
AU - Coccetti, Fabio
AU - Plana, Robert
PY - 2008
Y1 - 2008
N2 - This paper will first address the piezoelectric material characterization using a capacitance measurement technique. An original simple and efficient technique for the determination of the |d33| piezoelectric coefficient of lead zirconate titanate thin fims is described. Classical capacitor plate theory and piezoelectric material analysis are used to calculate the capacitance variation in lead zirconate titanate film, enabling piezoelectric coefficient to be determined. The technique outlined here avoids the use of mechanical/optical apparatus that may require heavy preparation of sample substrate geometry. Then, this work also treats design and fabrication issues associated with innovative tunable front-end components which combine two different ceramic technologies, namely multilayer ceramic circuit boards (low temperature colored ceramics or LTCC) and piezoelectric actuator technology within a single device.
AB - This paper will first address the piezoelectric material characterization using a capacitance measurement technique. An original simple and efficient technique for the determination of the |d33| piezoelectric coefficient of lead zirconate titanate thin fims is described. Classical capacitor plate theory and piezoelectric material analysis are used to calculate the capacitance variation in lead zirconate titanate film, enabling piezoelectric coefficient to be determined. The technique outlined here avoids the use of mechanical/optical apparatus that may require heavy preparation of sample substrate geometry. Then, this work also treats design and fabrication issues associated with innovative tunable front-end components which combine two different ceramic technologies, namely multilayer ceramic circuit boards (low temperature colored ceramics or LTCC) and piezoelectric actuator technology within a single device.
UR - http://www.scopus.com/inward/record.url?scp=70350316020&partnerID=8YFLogxK
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U2 - 10.1557/proc-1075-j03-01
DO - 10.1557/proc-1075-j03-01
M3 - Conference contribution
AN - SCOPUS:70350316020
SN - 9781605608570
T3 - Materials Research Society Symposium Proceedings
SP - 102
EP - 113
BT - Passive and Electromechanical Materials and Integration
PB - Materials Research Society
T2 - 2008 MRS Spring Meeting
Y2 - 24 March 2008 through 28 March 2008
ER -