Piezoelectric thin films characterization for MEMS applications

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Piezoelectric materials have a strong interaction between the mechanical and electrical properties that translates into innovative components and circuits architectures. A novel technique for the determination of the piezoelectric coefficients d31 is introduced. The technique utilize the interaction between mechanical and electrical properties in piezoelectric material. Both; the classical parallel capacitance plate analysis and piezoelectric material theory are used to calculate the capacitance variation in lead zirconate titanate (PZT) film, enabling piezoelectric coefficient to be determined. The values of d31 obtained experimentally is found to be similar to those that have been determined by more elaborate methods.

Original languageEnglish
Title of host publication2007 Asia-Pacific Microwave Conference, APMC
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
EventAsia-Pacific Microwave Conference, APMC 2007 - Bangkok, Thailand
Duration: Dec 11 2007Dec 14 2007

Publication series

NameAsia-Pacific Microwave Conference Proceedings, APMC

Other

OtherAsia-Pacific Microwave Conference, APMC 2007
Country/TerritoryThailand
CityBangkok
Period12/11/0712/14/07

Keywords

  • Characterization
  • MEMS
  • Material parameters
  • Piezoelectric material

ASJC Scopus subject areas

  • General Engineering

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