TY - GEN
T1 - Piezoresistive cantilever platform for label-free detection of molecules
AU - Gholamzadeh, Bahareh
AU - Ghafar-Zadeh, Ebrahim
AU - Awwad, Falah
AU - Sawan, Mohamad
PY - 2014/1/1
Y1 - 2014/1/1
N2 - MEMS sensors can be used for label-free detection in many different biological studies. Usually in this procedure the presence of special substance in a sample can be monitored based on its interaction and binding with specific probe molecules which are immobilized on a sensor. These interactions will result into variations which can be detected by biosensors. Developing a low cost, high throughput system for performing label-free detection can be beneficial for different studies. This type of platform can be used for real-time detection of multiple molecules with high sensitivity. As a first step towards developing such platform, in this paper we present a label-free detection system using an array of 30 cantilevers implemented through standard MEMS foundry process (MetalMUMPs). Herein, we discuss the design, fabrication, and characterization results of the proposed platform using electrical and interferometry techniques. The results from simulations have shown that sensors can be used for measuring small forces in range of nN and pN and the characterization tests have proven that sensors are functional and they are ready to be used in biological experiments.
AB - MEMS sensors can be used for label-free detection in many different biological studies. Usually in this procedure the presence of special substance in a sample can be monitored based on its interaction and binding with specific probe molecules which are immobilized on a sensor. These interactions will result into variations which can be detected by biosensors. Developing a low cost, high throughput system for performing label-free detection can be beneficial for different studies. This type of platform can be used for real-time detection of multiple molecules with high sensitivity. As a first step towards developing such platform, in this paper we present a label-free detection system using an array of 30 cantilevers implemented through standard MEMS foundry process (MetalMUMPs). Herein, we discuss the design, fabrication, and characterization results of the proposed platform using electrical and interferometry techniques. The results from simulations have shown that sensors can be used for measuring small forces in range of nN and pN and the characterization tests have proven that sensors are functional and they are ready to be used in biological experiments.
KW - COMSOL Multiphysics software
KW - Cantilever Array
KW - Label-free detection
KW - MetalMUMPs
KW - Piezoresistive sensors
UR - http://www.scopus.com/inward/record.url?scp=84904537353&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84904537353&partnerID=8YFLogxK
U2 - 10.1109/LASCAS.2014.6820319
DO - 10.1109/LASCAS.2014.6820319
M3 - Conference contribution
AN - SCOPUS:84904537353
SN - 9781479925070
T3 - 2014 IEEE 5th Latin American Symposium on Circuits and Systems, LASCAS 2014 - Conference Proceedings
BT - 2014 IEEE 5th Latin American Symposium on Circuits and Systems, LASCAS 2014 - Conference Proceedings
PB - IEEE Computer Society
T2 - 2014 IEEE 5th Latin American Symposium on Circuits and Systems, LASCAS 2014
Y2 - 25 February 2014 through 28 February 2014
ER -