Prediction of particulate characteristics in an expanding laser plume

Dustin Blair, Mark Tillack, Mofreh Zaghloul

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)


We present a mathematical model of particulate formation and dynamics in the laser ablation plume. This model is presented in a practical layout and applied to an example problem predicting the behavior of silicon, a material commonly used in the fabrication of microdevices. Additionally, we examine an intermediate intensity regime of laser ablation, in which there are multiple cooling mechanisms that can be considered important, but plume ionization is not significant. Results are discussed with an emphasis on pulsed laser ablation manufacturing processes, which often take place at atmospheric pressure. Important observations derived from this work are as follows: 1) The plume is quickly condensed and stopped in less than a microsecond in a distance of less than a millimeter at atmospheric pressure. 2) Particulates predicted by this model are on the order of 10Å in diameter, the majority of which condense back onto the target surface.

Original languageEnglish
Pages (from-to)139-150
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001
Externally publishedYes
EventMicromachining and Microfabrication Process Technology VII - San Francisco, CA, United States
Duration: Oct 22 2001Oct 24 2001


  • Ablation
  • Condensation
  • Laser
  • Plume

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Prediction of particulate characteristics in an expanding laser plume'. Together they form a unique fingerprint.

Cite this