Production and assembly of atomic clusters

J. G. Partridge, R. Reichel, A. Ayesh, D. M.A. Mackenzie, S. A. Brown

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

This paper describes the production of atomic clusters and their subsequent assembly into conducting films and wires on insulating substrates. An Ultra-High-Vacuum compatible Inert Gas Aggregation cluster deposition system which allows in-situ electrical measurements to be performed on deposited cluster films has been developed. Accurate placement and dimensional control of cluster-assembled films has been achieved in this system using soft-landed Bi and Sb clusters and templated substrates prepared using standard optical and electron-beam lithography. Self-contacting cluster-assembled films produced on planar Si xN y and SiO 2 passivated Si substrates have provided a means to study conduction through percolating networks. Cluster-assembled wires with sub-100 nm widths have been positioned on templated Si xN y and SiO 2 passivated Si substrates. The reported assembly techniques rely upon controlling cluster reflection from substrates and factors which affect the probability of cluster-reflection are discussed.

Original languageEnglish
Pages (from-to)1217-1222
Number of pages6
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume203
Issue number6
DOIs
Publication statusPublished - May 2006
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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