Production and assembly of atomic clusters

Keyphrases

• Cluster-assembled Films 100%
• Templated Substrates 50%
• Conductive Film 50%
• Ultra-high Vacuum 50%
• Deposited Clusters 50%
• Electron Beam Lithography 50%
• Conducting Wires 50%
• In Situ Electrical Measurements 50%
• Insulating Substrate 50%
• Percolating Network 50%
• Optical Beams 50%
• Vacuum Compatible 50%
• Accurate Placement 50%
• Sub-100 Nm 50%
• Gas Aggregation 50%

Engineering

• Assembled Film 100%
• Si Substrate 100%
• Dimensional Control 50%
• Electrical Measurement 50%
• Electron Optical Lithography 50%
• Cluster Film 50%