Properties of indium tin oxide thin films deposited on glass and clay substrates by ion-beam sputter deposition method

Engineering & Materials Science

• Sputter deposition 100%
• Ion beams 86%
• Tin oxides 84%
• Indium 79%
• Oxide films 75%
• Clay 59%
• Thin films 57%
• Glass 48%
• Substrates 43%
• ITO glass 40%
• Diffraction patterns 10%
• Crystal growth 10%
• Crystal orientation 10%
• Sheet resistance 10%
• Opacity 9%
• Stress relaxation 9%
• Surface morphology 8%
• Film thickness 8%
• X ray diffraction 7%
• Surface roughness 6%

Physics & Astronomy

• clays 67%
• indium oxides 60%
• tin oxides 58%
• ion beams 47%
• glass 35%
• thin films 31%
• oxide films 14%
• stress relaxation 5%
• crystal growth 5%
• optical spectrum 5%
• surface roughness 4%
• transmittance 4%
• diffraction patterns 4%
• film thickness 4%
• x rays 2%