Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

Pan Zheng; Yousef Haik; Ching Jen Chen; Zhaoning Jiang; Jim P. Zheng

doi:10.1016/j.surfcoat.2004.11.033

Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

Pan Zheng, Yousef Haik, Ching Jen Chen, Zhaoning Jiang, Jim P. Zheng

Department of Mechanical and Aerospace Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd₂Fe₁₄B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.

Original language	English
Pages (from-to)	372-377
Number of pages	6
Journal	Surface and Coatings Technology
Volume	194
Issue number	2-3
DOIs	https://doi.org/10.1016/j.surfcoat.2004.11.033
Publication status	Published - May 1 2005

Keywords

Magnetic MEMS
Pulsed laser deposition
Thin film

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2004.11.033

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title = "Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field",

abstract = "Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.",

keywords = "Magnetic MEMS, Pulsed laser deposition, Thin film",

author = "Pan Zheng and Yousef Haik and Chen, {Ching Jen} and Zhaoning Jiang and Zheng, {Jim P.}",

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journal = "Surface and Coatings Technology",

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T1 - Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

AU - Zheng, Pan

AU - Haik, Yousef

AU - Chen, Ching Jen

AU - Jiang, Zhaoning

AU - Zheng, Jim P.

PY - 2005/5/1

Y1 - 2005/5/1

N2 - Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.

AB - Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.

KW - Magnetic MEMS

KW - Pulsed laser deposition

KW - Thin film

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M3 - Article

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SN - 0257-8972

VL - 194

SP - 372

EP - 377

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 2-3

ER -

Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

Abstract

Keywords

ASJC Scopus subject areas

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