Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

Pan Zheng; Yousef Haik; Ching Jen Chen; Zhaoning Jiang; Jim P. Zheng

doi:10.1016/j.surfcoat.2004.11.033

Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

Pan Zheng
, Yousef Haik
, Ching Jen Chen
, Zhaoning Jiang
, Jim P. Zheng

Department of Mechanical and Aerospace Engineering

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd₂Fe₁₄B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.

Original language	English
Pages (from-to)	372-377
Number of pages	6
Journal	Surface and Coatings Technology
Volume	194
Issue number	2-3
DOIs	https://doi.org/10.1016/j.surfcoat.2004.11.033
Publication status	Published - May 1 2005

Keywords

Magnetic MEMS
Pulsed laser deposition
Thin film

ASJC Scopus subject areas

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2004.11.033

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title = "Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field",

abstract = "Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.",

keywords = "Magnetic MEMS, Pulsed laser deposition, Thin film",

author = "Pan Zheng and Yousef Haik and Chen, \{Ching Jen\} and Zhaoning Jiang and Zheng, \{Jim P.\}",

year = "2005",

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language = "English",

volume = "194",

pages = "372--377",

journal = "Surface and Coatings Technology",

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publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

AU - Zheng, Pan

AU - Haik, Yousef

AU - Chen, Ching Jen

AU - Jiang, Zhaoning

AU - Zheng, Jim P.

PY - 2005/5/1

Y1 - 2005/5/1

N2 - Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.

AB - Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.

KW - Magnetic MEMS

KW - Pulsed laser deposition

KW - Thin film

UR - https://www.scopus.com/pages/publications/13844275476

UR - https://www.scopus.com/pages/publications/13844275476#tab=citedBy

U2 - 10.1016/j.surfcoat.2004.11.033

DO - 10.1016/j.surfcoat.2004.11.033

M3 - Article

AN - SCOPUS:13844275476

SN - 0257-8972

VL - 194

SP - 372

EP - 377

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 2-3

ER -

Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

Abstract

Keywords

ASJC Scopus subject areas

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