RF MEMS status and perspectives

Fabio Coccetti, David Peyrou, Mahmoud Al Ahmad, Vincent Puyal, Patrick Pons, Hervé Aubert, Alex Muller, Mircea Dragoman, Robert Plana

Research output: Contribution to journalConference articlepeer-review


The key challenges for the next generation of communication architectures are related to their ability to modify their properties in order to fit with different applications and environmental conditions. Among the emerging approaches targeting these miniaturized systems called "Smart Microsystems", RF MEMS technology is considered as one of the most attractive and enabling solution. This paper will outline the main characteristics exhibited by RF MEMS technologies as well as the main technological process flow, the design and modelling methodologies that have to be implemented in order to meet the multi-physics and multi-scale challenge encountered in this field. The paper will continue with a major issue faced by RF MEMS related to reliability. Finally, the paper will finish with the presentation of innovative smart devices and systems that could be envisioned in the future.

Original languageEnglish
Pages (from-to)3822-3827
Number of pages6
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number12
Publication statusPublished - 2008
Externally publishedYes
Event3rd International Conference on Micro-Nanoelectronics, Nanotechnology and MEMs - Athens, Greece
Duration: Nov 18 2007Nov 21 2007

ASJC Scopus subject areas

  • Condensed Matter Physics


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