Abstract
The key challenges for the next generation of communication architectures are related to their ability to modify their properties in order to fit with different applications and environmental conditions. Among the emerging approaches targeting these miniaturized systems called "Smart Microsystems", RF MEMS technology is considered as one of the most attractive and enabling solution. This paper will outline the main characteristics exhibited by RF MEMS technologies as well as the main technological process flow, the design and modelling methodologies that have to be implemented in order to meet the multi-physics and multi-scale challenge encountered in this field. The paper will continue with a major issue faced by RF MEMS related to reliability. Finally, the paper will finish with the presentation of innovative smart devices and systems that could be envisioned in the future.
| Original language | English |
|---|---|
| Pages (from-to) | 3822-3827 |
| Number of pages | 6 |
| Journal | Physica Status Solidi (C) Current Topics in Solid State Physics |
| Volume | 5 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 2008 |
| Externally published | Yes |
| Event | 3rd International Conference on Micro-Nanoelectronics, Nanotechnology and MEMs - Athens, Greece Duration: Nov 18 2007 → Nov 21 2007 |
ASJC Scopus subject areas
- Condensed Matter Physics