TY - GEN
T1 - Surface micromachined crescent micropump
AU - Haik, Yousef
AU - Hendrix, Jason
AU - Galambos, Paul
AU - Kilani, Mohammad
PY - 2010/7/16
Y1 - 2010/7/16
N2 - This study presents the design, fabrication, analysis and testing of a novel crescent micropump fabricated using surface micromachining technology. The pump utilizes a ring gear driven through teeth on its outer surface to drive the pumping mechanism through teeth on its inner surface. An analytical solution for the volumetric flow rate for the micropump agrees with the obtained experimental results.
AB - This study presents the design, fabrication, analysis and testing of a novel crescent micropump fabricated using surface micromachining technology. The pump utilizes a ring gear driven through teeth on its outer surface to drive the pumping mechanism through teeth on its inner surface. An analytical solution for the volumetric flow rate for the micropump agrees with the obtained experimental results.
UR - http://www.scopus.com/inward/record.url?scp=77954510958&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77954510958&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:77954510958
SN - 9789948427186
T3 - ISMA'10 - 7th International Symposium on Mechatronics and its Applications
BT - ISMA'10 - 7th International Symposium on Mechatronics and its Applications
T2 - 7th International Symposium on Mechatronics and its Applications, ISMA'10
Y2 - 20 April 2010 through 22 April 2010
ER -