Surface micromachined crescent micropump

Yousef Haik, Jason Hendrix, Paul Galambos, Mohammad Kilani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This study presents the design, fabrication, analysis and testing of a novel crescent micropump fabricated using surface micromachining technology. The pump utilizes a ring gear driven through teeth on its outer surface to drive the pumping mechanism through teeth on its inner surface. An analytical solution for the volumetric flow rate for the micropump agrees with the obtained experimental results.

Original languageEnglish
Title of host publicationISMA'10 - 7th International Symposium on Mechatronics and its Applications
Publication statusPublished - 2010
Event7th International Symposium on Mechatronics and its Applications, ISMA'10 - Sharjah, United Arab Emirates
Duration: Apr 20 2010Apr 22 2010

Publication series

NameISMA'10 - 7th International Symposium on Mechatronics and its Applications

Other

Other7th International Symposium on Mechatronics and its Applications, ISMA'10
Country/TerritoryUnited Arab Emirates
CitySharjah
Period4/20/104/22/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering

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