@inproceedings{472e23fb709b424487fe439999b15f26,
title = "Surface micromachined viscous spiral pump",
abstract = "One distinguishing feature of micro scale fluid flow is its low Reynolds number, which is attributed to the small characteristic dimension and dominant viscous effects. Motivated by the observation that low Reynolds pumping on the macro-scale is often achieved by viscous drag, a micro-scale viscous drag pump, which drags fluid along a spiral-shaped channel, is developed using surface micromachining. The paper presents the detailed design of the mechanical elements of the pump and an analysis of the flow field in its spiral channel.",
keywords = "Micropump, Spiral, Surface micromachining, Viscous",
author = "Kilani, {M. I.} and Galambos, {P. C.} and Y. Haik and Chen, {C. J.}",
year = "2003",
language = "English",
isbn = "0972842209",
series = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
pages = "210--213",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",
}