TCAD MEMS overview

D. Peyrou, I. Achkar, F. Pennec, F. Coccetti, M. Al Ahmad, P. Pons, R. Plana

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents an overview of the important issues in the field of TCAD MEMS. It will be shown different techniques to investigate the materials properties of MEMS and their impact on the RF MEMS characteristics. Multi-physic simulation are presented to predict the initial deformation of MEMS based membrane and to predict the capacitive and DC contact characteristics of RF MEMS.

Original languageEnglish
Title of host publicationCAS 2007 Proceedings - 2007 International Semiconductor Conference
Pages21-24
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event2007 International Semiconductor Conference, CAS 2007 - Sinaia, Romania
Duration: Oct 15 2007Oct 17 2007

Publication series

NameProceedings of the International Semiconductor Conference, CAS
Volume1

Conference

Conference2007 International Semiconductor Conference, CAS 2007
Country/TerritoryRomania
CitySinaia
Period10/15/0710/17/07

Keywords

  • Contact properties
  • Material properties
  • Multi-physics simulation
  • RF MEMS
  • Roughness
  • Young modulus

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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