@inproceedings{73e1e0d31c24404eb85aabe0c53906d1,
title = "TCAD MEMS overview",
abstract = "This paper presents an overview of the important issues in the field of TCAD MEMS. It will be shown different techniques to investigate the materials properties of MEMS and their impact on the RF MEMS characteristics. Multi-physic simulation are presented to predict the initial deformation of MEMS based membrane and to predict the capacitive and DC contact characteristics of RF MEMS.",
keywords = "Contact properties, Material properties, Multi-physics simulation, RF MEMS, Roughness, Young modulus",
author = "D. Peyrou and I. Achkar and F. Pennec and F. Coccetti and {Al Ahmad}, M. and P. Pons and R. Plana",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/SMICND.2007.4519639",
language = "English",
isbn = "1424408474",
series = "Proceedings of the International Semiconductor Conference, CAS",
pages = "21--24",
booktitle = "CAS 2007 Proceedings - 2007 International Semiconductor Conference",
note = "2007 International Semiconductor Conference, CAS 2007 ; Conference date: 15-10-2007 Through 17-10-2007",
}