The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targets

Y. Zhou, P. J. Kelly, A. Postill, O. Abu-Zeid, A. A. Alnajjar

Research output: Contribution to journalConference articlepeer-review

95 Citations (Scopus)


Mixed zinc oxide and alumina powder targets have been used to prepare transparent semi-conductive films on glass by pulsed magnetron sputtering. The structure, crystallinity, optical properties, electrical properties and adhesion of the films were investigated using a range of techniques, including SEM, XRD, spectrophotometry, four-point probe and scratch adhesion testing. Also, the properties of the coatings before and after annealing under various conditions are compared. The crystallinity of the films increased and the preferred orientation in some of the samples changed from (1 0 0) to (0 0 2) after annealing. The transparent lines of the coatings showed blue shifts with the average transmittance within the visible range being up to 90%. Resistivities of the order of 10-3 Ωcm were obtained after annealing, without deterioration of the coating-to-substrate adhesion. The results to date demonstrate that the pulsed magnetron sputtering of Al-doped ZnO films from powder targets is a versatile, novel technique for the deposition of high quality transparent conductive oxide materials. As a demonstration of the flexibility of this technique, preliminary results from an investigation into indium-doped zinc oxide coatings are also included here.

Original languageEnglish
Pages (from-to)33-39
Number of pages7
JournalThin Solid Films
Publication statusPublished - Jan 30 2004
EventProceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States
Duration: Apr 28 2002May 2 2002


  • Pulsed magnetron sputtering
  • Transparent conductive oxides
  • ZnO:Al coatings

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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