The deposition of aluminium oxide coatings by reactive unbalanced magnetron sputtering

Keyphrases

• Aluminum Oxide Coating 100%
• Unbalanced Magnetron Sputtering 100%
• Deposition Rate 100%
• Maximum Frequency 50%
• Substoichiometric 50%
• Columnar 50%
• Pulsed Power Supply 50%
• Power Supply 50%
• Coating Properties 50%
• Coating Composition 50%
• Stable Operation 50%
• Wear Test 50%
• Deposition Parameters 50%
• Insulating Layer 50%
• Knoop Microhardness 50%
• Al2O3 Film 50%
• Insulating Materials 50%
• Being Observed 50%
• AlOx 50%
• Variable Frequency Supply 50%

Engineering

• Aluminum Oxide 100%
• Magnetron 100%
• Deposition Rate 66%
• Insulating Layer 33%
• Growing Film 33%
• Deposition Parameter 33%
• Supply Frequency 33%
• Insulating Material 33%

Material Science

• Oxide Coating 100%
• Insulating Material 50%
• Film Growth 50%