@inproceedings{84e8c7ed97904854a1b17b8d0c52e2db,
title = "The effect of substrate clamping on piezoelectric thin-film parameters",
abstract = "The behaviour of the piezoelectric materials is determined by its coefficient d33 which describes the strain parallel to the polarization vector of the ceramics. Full sheet characterization is essential to understand material behavior when it's clamped on the substrate. In this work, full field 3D noncontact surface measurements based on optical interferometer from FOGALE Nanotech with vertical resolution down to 0.1 nm is used to measure the piezoelectric coefficients of PZT thin film. The measurements analysis predicts a reduction of 50% for the d33 values.",
keywords = "MEMS, Material parameters, Piezoelectric materials, Sensors",
author = "{Al Ahmad}, Mahmoud and F. Coccetti and R. Plana",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/APMC.2007.4554764",
language = "English",
isbn = "1424407494",
series = "Asia-Pacific Microwave Conference Proceedings, APMC",
booktitle = "2007 Asia-Pacific Microwave Conference, APMC",
note = "Asia-Pacific Microwave Conference, APMC 2007 ; Conference date: 11-12-2007 Through 14-12-2007",
}