The effect of substrate clamping on piezoelectric thin-film parameters

Mahmoud Al Ahmad, F. Coccetti, R. Plana

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

The behaviour of the piezoelectric materials is determined by its coefficient d33 which describes the strain parallel to the polarization vector of the ceramics. Full sheet characterization is essential to understand material behavior when it's clamped on the substrate. In this work, full field 3D noncontact surface measurements based on optical interferometer from FOGALE Nanotech with vertical resolution down to 0.1 nm is used to measure the piezoelectric coefficients of PZT thin film. The measurements analysis predicts a reduction of 50% for the d33 values.

Original languageEnglish
Title of host publication2007 Asia-Pacific Microwave Conference, APMC
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
EventAsia-Pacific Microwave Conference, APMC 2007 - Bangkok, Thailand
Duration: Dec 11 2007Dec 14 2007

Publication series

NameAsia-Pacific Microwave Conference Proceedings, APMC

Other

OtherAsia-Pacific Microwave Conference, APMC 2007
Country/TerritoryThailand
CityBangkok
Period12/11/0712/14/07

Keywords

  • MEMS
  • Material parameters
  • Piezoelectric materials
  • Sensors

ASJC Scopus subject areas

  • General Engineering

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