The role of the atomic structure on the Si/SiO₂ interface strains

Keyphrases

• Atomic Scale 25%
• Atomic Structure 100%
• Bond Angle 100%
• Complementary Metal-oxide-semiconductor Technology 25%
• Crystalline Silicon 25%
• First-principles Density Functional Theory 25%
• Industrial Research 25%
• Interface Model 50%
• Interface Strain 100%
• Interface Structure 25%
• Leftovers 25%
• Local Density Approximation 25%
• MOSFET 25%
• Oxygen Atom 25%
• Scale Levels 25%
• Shear Strain 50%
• Si-O Bond 100%
• Si-SiO2 Interface 100%
• Tensile Strain 50%
• Underground Physics 25%

Engineering

• Complementary Metal-Oxide-Semiconductor 50%
• Crystalline Silicon 50%
• Industrial Research 50%
• Local Density Approximation 50%
• Oxygen Atom 50%
• Scale Level 50%
• Scale Structure 50%
• Shear Strain 100%
• Tensile Strain 100%

Material Science

• Atomic Structure 100%
• Complementary Metal-Oxide-Semiconductor Device 50%
• Interface Structure 50%
• Metal-Oxide-Semiconductor Field-Effect Transistor 50%
• Shear Strain 100%
• Tensile Strain 100%