TY - GEN
T1 - Thermo-electro-mechanical V-shaped actuator design and simulations
AU - Matmat, M.
AU - Al Ahmad, M.
AU - Escriba, C.
AU - Soulimane, S.
AU - Marty, A.
AU - Fourniols, J. Y.
PY - 2008
Y1 - 2008
N2 - This work details the 3D finite element electro-thermo-mechanical simulation of a current driven V-shaped actuator. The latter consists of two suspended polysilicon arms in a V configuration. The interest of this structure is that it can provide an important linear displacement parallel to the substrate. Stationary and parametric simulations were performed using COMSOL 3.3 and the obtained results were validated experimentally. In addition, a first attempt to model the actuator's ageing behaviour has been made using an empirical model.
AB - This work details the 3D finite element electro-thermo-mechanical simulation of a current driven V-shaped actuator. The latter consists of two suspended polysilicon arms in a V configuration. The interest of this structure is that it can provide an important linear displacement parallel to the substrate. Stationary and parametric simulations were performed using COMSOL 3.3 and the obtained results were validated experimentally. In addition, a first attempt to model the actuator's ageing behaviour has been made using an empirical model.
UR - http://www.scopus.com/inward/record.url?scp=49249115217&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=49249115217&partnerID=8YFLogxK
U2 - 10.1109/ESIME.2008.4525031
DO - 10.1109/ESIME.2008.4525031
M3 - Conference contribution
AN - SCOPUS:49249115217
SN - 9781424421282
T3 - EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
BT - EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
T2 - EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
Y2 - 20 April 2008 through 23 April 2008
ER -