Thermo-electro-mechanical V-shaped actuator design and simulations

M. Matmat, M. Al Ahmad, C. Escriba, S. Soulimane, A. Marty, J. Y. Fourniols

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This work details the 3D finite element electro-thermo-mechanical simulation of a current driven V-shaped actuator. The latter consists of two suspended polysilicon arms in a V configuration. The interest of this structure is that it can provide an important linear displacement parallel to the substrate. Stationary and parametric simulations were performed using COMSOL 3.3 and the obtained results were validated experimentally. In addition, a first attempt to model the actuator's ageing behaviour has been made using an empirical model.

Original languageEnglish
Title of host publicationEuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
DOIs
Publication statusPublished - 2008
Externally publishedYes
EventEuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems - Freiburg im Breisgau, Germany
Duration: Apr 20 2008Apr 23 2008

Publication series

NameEuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems

Other

OtherEuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
Country/TerritoryGermany
CityFreiburg im Breisgau
Period4/20/084/23/08

ASJC Scopus subject areas

  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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