TY - GEN
T1 - Three-dimensional nano temperature sensors
AU - El-Shimy, Haitham M.Magdy
AU - Arai, Fumihito
AU - Fukuda, Toshio
PY - 2006
Y1 - 2006
N2 - In this work, we illustrate the fabrication of nano temperature sensors using focused ion beam chemical vapor deposition (FIB-CVD) of tungsten over atomic force microscope (AFM) cantilever, for sensing temperature distribution in local area. The FIB-CVD sensors were calibrated and the temperature coefficient of resistance shows positive characteristics. Building sensors by this approach is quite faster and easier to fabricate than other reported temperature sensing devices and can be modified to a mass production technique.
AB - In this work, we illustrate the fabrication of nano temperature sensors using focused ion beam chemical vapor deposition (FIB-CVD) of tungsten over atomic force microscope (AFM) cantilever, for sensing temperature distribution in local area. The FIB-CVD sensors were calibrated and the temperature coefficient of resistance shows positive characteristics. Building sensors by this approach is quite faster and easier to fabricate than other reported temperature sensing devices and can be modified to a mass production technique.
KW - Chemical vapor deposition
KW - Foused ion beam
KW - Nanodevices
KW - Temperature coefficient of resistance
KW - Temperature sensors
KW - Tungsten
UR - http://www.scopus.com/inward/record.url?scp=42549098539&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=42549098539&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:42549098539
SN - 1424400783
SN - 9781424400782
T3 - 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
SP - 770
EP - 772
BT - 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
T2 - 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Y2 - 17 June 2006 through 20 June 2006
ER -