Three-dimensional nano temperature sensors fabricated using focused ion beam chemical vapour deposition

Haitham M Magdy El-Shimy, Fumihito Arai, Toshio Fukuda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2006 Sixth IEEE Conference on Nanotechnology
Pages	770-772
Number of pages	3
Volume	2
Publication status	Published - 2006
Externally published	Yes

Cite this

@inproceedings{1556bd514b9c4d22b88bbbebc7d74aa6,

title = "Three-dimensional nano temperature sensors fabricated using focused ion beam chemical vapour deposition",

author = "El-Shimy, \{Haitham M Magdy\} and Fumihito Arai and Toshio Fukuda",

year = "2006",

language = "English",

volume = "2",

pages = "770--772",

booktitle = "2006 Sixth IEEE Conference on Nanotechnology",

}