Toward spirometry-on-chip: design, implementation and experimental results

Ebrahim Ghafar-Zadeh, Bahareh Gholamzadeh, Giancarlo Ayala-Charca, Parastoo Baghaei Raveri, Martin Matynia, Mohamad Sawan, Falah Awwad, Sebastian Magierowski

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


This paper presents a new approach towards the development of a spirometer-on-chip device for point-of-care diagnostics. The proposed device consists of a cantilever based airflow sensor fabricated through a multi-user MEMS process. The deflection of each cantilever beam is measured using capacitive electrodes integrated on a single semiconductor chip. These electrodes are connected to an off-chip custom-made readout interface circuit for the measurement of minute capacitive changes and for the acquisition of data into a computer. Herein, we discuss and demonstrate the characterization results of such a system using a low complexity air-based technique. Additionally, we demonstrate the applicability of these devices for spirometry on breathing tests of human subjects. Based on these results, the proposed spirometer-on-chip shows significant promise for use as a mobile portable system for continuous health assessment of respiratory health.

Original languageEnglish
Pages (from-to)4591-4598
Number of pages8
JournalMicrosystem Technologies
Issue number10
Publication statusPublished - Oct 1 2017

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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