@inproceedings{4f3c2d90fcdb429bbf7649ff34d2c48a,
title = "Tunable low-field interdigitated barium strontium titanate capacitors",
abstract = "The rapid growth of communication systems demand for wide tunable low loss microwave components. Barium strontium titanate (BST) voltage dependent permittivity has shown a greal potential impact for the fabrication of frequency agile components. In this work, BST interdigital capacitor (IDC) on silicon substrate exhibiting high tunability at low bias voltages is presented. The interdigital capacitor with a 3 μm gap is characterized. The tunabilily of 3:1 is obtained at bias voltage of 5 V. This corresponds to a 3.5 μm electrode gap width and a 5 V d c bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.",
keywords = "BST, Capacitors, Thin film, Tunable circuit, Varactors",
author = "{Al Ahmad}, Mahmoud and G. Leclerc and M. Brunet and N. Mauran and L. Bary and R. Plana and S. Payan and D. Michau and M. Maglione",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/APMC.2007.4555006",
language = "English",
isbn = "1424407494",
series = "Asia-Pacific Microwave Conference Proceedings, APMC",
booktitle = "2007 Asia-Pacific Microwave Conference, APMC",
note = "Asia-Pacific Microwave Conference, APMC 2007 ; Conference date: 11-12-2007 Through 14-12-2007",
}