TY - GEN
T1 - Tunable thin film integrated material characterizations for microwave applications
AU - Al Ahmad, Mahmoud
AU - Payan, Sandrine
AU - Michau, Dominique
AU - Maglione, Mario
AU - Plana, Robert
PY - 2008
Y1 - 2008
N2 - In this work, a simple, fast and repeatable technique is proposed for tunable integrated thin film material characterizations. The technique does not depend on the type of material development method or special thin film processing. Moreover, additional structures or calibrations are not required. The proposed method can be used to determine the loss of a thin film material using radio frequency capacitance measurements in both parallel plate and interdigital topologies. An analytical formulation is given for the computation of the film loss based on its measured input impedance which is extracted from the measured scattering parameters. This technique is used for barium strontium titanate (BST) thin film material characterizations.
AB - In this work, a simple, fast and repeatable technique is proposed for tunable integrated thin film material characterizations. The technique does not depend on the type of material development method or special thin film processing. Moreover, additional structures or calibrations are not required. The proposed method can be used to determine the loss of a thin film material using radio frequency capacitance measurements in both parallel plate and interdigital topologies. An analytical formulation is given for the computation of the film loss based on its measured input impedance which is extracted from the measured scattering parameters. This technique is used for barium strontium titanate (BST) thin film material characterizations.
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U2 - 10.1557/proc-1075-j02-07
DO - 10.1557/proc-1075-j02-07
M3 - Conference contribution
AN - SCOPUS:70350266363
SN - 9781605608570
T3 - Materials Research Society Symposium Proceedings
SP - 114
EP - 120
BT - Passive and Electromechanical Materials and Integration
PB - Materials Research Society
T2 - 2008 MRS Spring Meeting
Y2 - 24 March 2008 through 28 March 2008
ER -