Tuning of barium strontium titanate (BST) thin film materials employing high resistive thin indium tin oxide (ITO) layer

Mahmoud Al Ahmad, Sandrine Payan, Dominique Michau, Mario Maglione, Robert Plana

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The rapid growth of communication systems demands for wide tunable low loss microwave components. Barium strontium titanate (BST) voltage dependent permittivity has shown a great potential impact for the fabrication of frequency agile components. In this work, the indium tin oxide (ITO) high resistive thin layer is used as a bottom electrode to tune BST based structures such as parallel plate capacitor and CPW line. The tunability is reduced due to voltage drop in the ITO layer which exhibits a high dc resistance. The effect of using ITO thin layer in microwave device is explored.

Original languageEnglish
Title of host publicationProceedings of the 38th European Microwave Conference, EuMC 2008
Pages809-812
Number of pages4
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event38th European Microwave Conference, EuMC 2008 - Amsterdam, Netherlands
Duration: Oct 27 2008Oct 31 2008

Publication series

NameProceedings of the 38th European Microwave Conference, EuMC 2008

Other

Other38th European Microwave Conference, EuMC 2008
Country/TerritoryNetherlands
CityAmsterdam
Period10/27/0810/31/08

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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